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COPRA Product Family

COPRA Round Sources

Wafer processing up to 12“ substrates Plasma Assist in PVD Coaters
Plasma Activation and Cleaning ALD enhancement

COPRA Linear Sources

Roll-To-Roll „Web“ Processing Dynamic PECVD on Flexible Substrates
PVD Assist and PECVD in Batch Processing 

COPRA Ring Sources

Flat Panel PECVD up to Generation 5 Dynamic PECVD on Large Substrates
PVD Assist and PECVD in Batch Processing

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COPRA Built In Sources

E-Gun Assist „Web“ Processing
Direct DLC in optics (Inside chamber mounting)

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COPRA Plasma Systems

InLine or Batch
PECVD coaters for metaloxide/nitride functional coatings

under construction

Faraday Cup

Faraday Cup CEA 4 Measurement Systems