COPRA Products

COPRA Products COPRA Round Sources

Overview DN160-CF-GM DN201-X-GR DN201-X-GM DN250-CF-GRPE DN251-ISO-K-EGRPE DN401-GRPE DN501-GRPE DN-custom design

COPRA Linear Sources

Overview LS360x200-GRPE LS500x500-DPRPE LS670x203-GRPE LS800x250-DPRPE LS1100x202-GRPE LS1300x202-GRPE LS-custom design

COPRA Ring Sources

Overview RS1000x300-DPR RS1000x402-DPR RS650x550-DPR RS700x600-DPR RS850x850-DPR RS400-DPR RS500x500-DPR RS-custom design

COPRA Built In Sources

Overview COPRA IS201-G(I)R(PE)IS201-EG(I)R(PE)IS301-EGIRPE IS400-EGIRPE IS502-EGIRPE IS1100x250-GRPE IS-custom design

Faraday Cup System

Applications

PECVD

PVD Assist

PVD-Assist Sputter Assist COPRA Thermal & E-Beam Evaporation Assist

Etching

Reactive Etching Physical Etching

Cleaning & Activation PALD-Assist

COPRA´s Basics R&D News/Events Contact Jobs/Career Partners

COPRA Application Overview

Germany

CCR GmbH
Camp-Spich-Str. 3a
D-53842 Troisdorf

T: +49(0)2241-93215-0
F: +49(0)2241-93215-200

contact(at)ccrtechnology.de
www.rf-icp-plasmasources.com

Products

COPRA Round Sources
COPRA Linear Sources
COPRA Ring Sources
COPRA Built In Sources
Faraday Cup System

Impressum/Disclaimer