COPRA Linear Sources

The COPRA LS358x156 is designed for PVD-Assisted DLC coating processes as also fast substrate cleaning and activation processes on substrate widths up to 300 mm. The COPRA LS358x156 solutions for batch PVD drum/tool coaters are state of the art Sputter Assist solutions with benchmarking post oxidation performances for high quality and productivity markets. The exceptional post oxidation properties are gaining increasing market interest for precision optical coating applications with high throughput requirements where magnetron sputtering solutions are gaining more and more market. These LS sources in a reactive sputter set up do also increase the densification of your film providing a better stoichiometry of it thus enabling high quality decorative coatings. The COPRA LS358x156 are typically installed in mixed PVD/PECVD coater setups where you have movable substrates as i.e. vertical or horizontal batch/or inline coaters. 

Main Applications

COPRA LS358x156
358x156 mm
neutral Plasma Beam (no filament)
Integrated Remote Match
-
300 mm
CCR Flange
13,56 MHz
5 kW
-
2x10-4 to 1x10-2 mbar
7/16 or LC
Profibus/Serial
2x flex tube 6 mm
>3L/min
Swagelok 6 mm or VCR 1/4
AL
85 kg

The COPRA LS500x500 DPR plasma sources are in particular designed for high rate PECVD coatings, chemical etching and physical etching applications as also to assist atomic layer depositions for substrate sizes of up to approx.400x400 mm size in static coater set ups. A variety of different functional coatings as i.e. SiO2, SiN, Al2O3, TiO2 depositions etc. are possible to coat by simply changing precursor gases. These sources can handle any type of gases for reactive etching requirements.  

Main Applications

COPRA LS500x500
500x500 mm
neutral Plasma Beam (no filament)
Integrated Remote Match
400x400 mm
-
CCR Flange
13,56 MHz
5 kW
-
5x10-4 to 1x10-1 mbar
7/16 or LC
Profibus or Serial
2x flex tube 6 mm
>3L/min
Swagelok 6 mm
AL
95 kg

The COPRA LS670x202 is designed for PVD-Assist and DLC coating processes as also fast substrate cleaning and activation processes on substrate widths up to 500 mm. The COPRA LS670x202 solutions for batch PVD drum/tool coaters are state of the art Sputter Assist solutions with benchmarking post oxidation performances for high quality and productivity markets. They can also be upgraded in order to be PECVD compliant. The exceptional post oxidation properties are gaining increasing market interest for precision optical coating applications with high throughput requirements where magnetron sputtering solutions are gaining more and more market. These LS sources in a reactive sputter set up do also increase the densification of your film providing a better stoichiometry of it thus enabling high quality decorative coatings. The COPRA LS670x202 are typically installed in mixed PVD/PECVD coater setups where you have movable substrates as i.e. vertical or horizontal batch/or inline coaters. 

Main Applications

COPRA LS670x202
670x200 mm
neutral Plasma Beam (no filament)
Integrated Remote Match
-
600 mm
CCR Flange
13,56 MHz
5 kW
-
2x10-4 to 1x10-2 mbar
7/16 or LC
Profibus/Serial
2x flex tube 6 mm/2x flex tube 8 mm
>3L/min
VCR/Swagelok 6 mm
AL
95 kg

The COPRA LS700x251 is designed for high performance PECVD applications with substrate widths of up to 600 mm. The gas cracking efficiency paired with the ability to steadily perform process appropriate levels of ion energy coupled with the adequate ion current density enable a variety of functional coatings on large areas. Forget the uniformity problems which typically occur with the use of RF technology for large area applications. The COPRA LS700x251, the right choice for high throughput and quality metal oxide applications.

Main Applications

COPRA LS700x251
700x250
neutral Plasma Beam (no filament)
Integrated Remote Match
-
600 mm
CCR Flange
13,56 MHz
5 or 10 kW
-
5x10-4 to 1x10-1 mbar
7/16 or LC
Profibus/Serial
2x flex tube 6 mm/2x flex tube 8 mm
>3L/min
VCR/Swagelok 6 mm
AL
100 kg

The COPRA LS950x201 is designed for PVD-Assist and DLC coating processes as also fast substrate cleaning and activation processes on substrate widths up to 850 mm. The COPRA LS950x201 solutions for batch PVD drum/tool coaters are state of the art Sputter Assist solutions with benchmarking post oxidation performances for high quality and productivity markets. The exceptional post oxidation properties are gaining increasing market interest for precision optical coating applications with high throughput requirements where magnetron sputtering solutions are gaining more and more market. These LS sources in a reactive sputter set up do also increase the densification of your film providing a better stoichiometry of it thus enabling high quality decorative coatings. The COPRA LS950x201 are typically installed in mixed PVD/PECVD coater setups where you have movable substrates as i.e. vertical or horizontal batch/or inline coaters. 

Main Applications

COPRA LS950x201
950x200 mm
neutral Plasma Beam (no filament)
Integrated Remote Match
-
850 mm
CCR Flange
13,56 MHz
6 or 8 kW
-
3x10-4 to 1x10-2 mbar
7/16 or LC
Profibus/Serial
2x flex tube 6 mm/2x flex tube 8 mm
>3L/min
Swagelok 6 mm
AL
110 kg

The COPRA LS1100x201 is designed for PVD-Assist and DLC coating processes as also fast substrate cleaning and activation processes on substrate widths up to 1000 mm. The COPRA LS1100x201 solutions for batch PVD drum/tool coaters are state of the art Sputter Assist solutions with benchmarking post oxidation performances for high quality and productivity markets. The exceptional post oxidation properties are gaining increasing market interest for precision optical coating applications with high throughput requirements where magnetron sputtering solutions are gaining more and more market. These LS sources in a reactive sputter set up do also increase the densification of your film providing a better stoichiometry of it thus enabling high quality decorative coatings. The COPRA LS1100x201 are typically installed in mixed PVD/PECVD coater setups where you have movable substrates as i.e. vertical or horizontal batch/or inline coaters. 

Main Applications

COPRA LS1100x201
1100x201 mm
neutral Plasma Beam (no filament)
Integrated Remote Match
-
1000 mm
CCR Flange
13,56 MHz
6 or 8 kW
-
3x10-4 to 1x10-2 mbar
7/16 or LC
Profibus/Serial
2x flex tube 8 mm
>3L/min
Swagelok 6 mm
AL
115 kg

CCR is continously evolving, pioneering new approaches or reinventing existing ones stretching ourselves to better in everything we do. More than 20 years in the customization of RF-plasma sources are important values to be considered in order to find the best possible solution. Should you have a specific need for a customized solution please do not hesitate to contact us. We can customize any of our products and look forward to become your valuable supplier.