COPRA IS1100x250-GRPE Built In Plasma Source

The COPRA IS1100x250-GRPE Built In Plasma Source have from the origin been designed for the assist of nearly any kind of PVD deposition processes.The unique design allows you also to integrate the COPRA IS1100x250-GRPE Built In Plasma Source completely inside vacuum in your existing Inline- or R2R-Coater in order to e.g. pre treat or oxidize your substrates. The COPRA IS1100x250-GRPE Built In Plasma Source is also easy to scale in size and power if requested. Please see the IS-custom design site.

Main Applications

PVD-Assist

Activation

Cleaning

Technical Data

COPRA IS1100x250-GRPE

Plasma Opening

1100x250 mm

Plasma

neutral Plasma Beam (no filament)

Impedance Match

Integrated Remote Match

Substrate Size (static)

Substrate width (dynamic)

1000 mm

Flange Type

DN40 KF

Excitation Frequency

13,56 MHz

RF-Power

6 kW

Energy Variation

Yes

Pressure Range

5x10-4 to 1x10-2 mbar

RF-Connection

Interface

Profibus/Serial

Water Connection

2x flex tube 8 mm

Water Flow

>2L/min

Gas Connection

Swagelok 4 mm

Flange Body

approx. weight

95 kg