Highly tetrahedral hydrogenated amorphous carbon, Ta-C:H
For the first time in the world Members of CCR announced in the early 90ies the existence of a hydrogenated form of tetrahedral amorphous carbon, so called ta-C:H. At this time only the none hydrogenated form of tetrahedral carbon ta-C was known achieved by PVD methods like filtered cathodic vacuum arc. Ta-C:H, also well known as PBS-Carbon was achieved by a PECVD Technology using acetylen as precursor gas. It has similar properties like ta-C and is due to its mechanical properties and the ease of the PECVD process for most industrial applications superior to conventional DLC coatings. |
