COPRA RS9, RS 10 and RS11
The Series R9 to RS11 is the standard COPRA Technology for large area applications up to a substrates size of 1400mm in square i.e. generation 5 of flat panel standards. It provides the highest degree of flexibility and enables many different ways of process implementation. The RS sources are both side opened and allows one to operate a process by using two sides of the plasma volume which increases the through put by nearly a factor of 2 and guarantees power efficiencies of more than 80%. |
