| COPRA RS6 The COPRA RS6 plasma sources are designated for dynamic plasma deposition, etching and cleaning in roll to roll coaters or inline coaters of a width of more than 1000mm.Using a multiple arrangement of RS 6 sources in one line breaks down any limitation in substrate width and the COPRA RS6 Technology is seen to be the most power full technique for PECVD of Oxides and Nitrides in Jumbo Glass Coaters. |
 |
 |
||
| Substrate Width | 1000 mm dynamic | ||
| Pressure Range | 5E-4 to 1 mbar | ||
| Gases | Any | ||
| RF-Power | max. 10.000 Watt | ||
| Matching | Remote | ||
| Ion Energy | below 50eV | ||
| Current Density | up to 3mA/cm2 | ||
| Apps |
|