COPRA RS 400
The COPRA RS400 is a both side opened Plasma Source for round substrates up to 200mm in diameter. It enables to operate with a surface on two sides of the plasma volume, which simply can double the through put in industrial production. In general the Copra RS Series follows the stream of innovation always accomplishing the COPRA History. Questions like how to increase throughput and how to lower precursor costs motivated the realization of a COPRA RS Version in the year of 2008.
| Substrate Size |
up to 220 mm |
 |
 |
| Pressure Range |
5E-4 to 1mbar |
| Gases |
any |
| RF - Power |
max. 5000 Watt |
| RF - Matching |
Remote |
| Ion Energy |
below 50 eV |
| Current Density |
up 3 mA/cm2 |
| Extraction |
Grid Less |
Apps
|
8" wafer Processing |
|
