| SINGULAR – A Novel Static Inline PECVD-Deposition Concept for Silicon-Cell Production B.F.P. Roos, O. Hohn, T. Dippell, B. Cord, M.R. Huber, P. Bink 24thEUPVSEC2009 |
| Formation of High Quality AlN Tunnel Barriers via an Inductively Couple Plasma Thomas W. Cecil1*, Arthur W. Lichtenberger1, and Anthony R. Kerr2 19th International Symposium on Space Terahertz Technology, Groningen, 28-30 April 2008 1Univeristy of Virginia, Charlottesville, VA 22901, USA 2National Radio Astronomy Observatory, Charlottesville, VA 2290X, USA |
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| Preparation and properties of highly tetrahedral hydrogenated amorphous carbon M. Weiler, S.Sattel, K. Jung, H. Ehrhardt, V.S. Veerasamy and J. Robertson Phys.Rev.B, 53 (1996) 1594 |
| Deposition of tetrahedral hydrogenated amorphous carbon using a novel electron cyclotron wave resonance reactor M.Weiler, K. Lang, E. Li und J. Robertson Appl. Phys. Lett. 71 (25) 1997 |
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