COPRA IS300
Where are all other COPRA Plasma source are flange mounted source the COPRA IS300 is the first real In Build “IS” source designated for the retro fit of plasma assist in optical box coaters. A strong demand is coming up to replace classical ion source technology by COPRA like plasma sources. Mainly the independent control of ion energy as a function of power as well as the high amount of atomic radicals benefits the deposition of drift free oxides and nitride layers for precision optics on temperature sensitive oxides.
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| Calotte Size |
up to 1200mm |
| RF-Power |
max. 3000 Watt |
| RF-Matching |
Integrated Remote Match |
| Pressure Range |
1E-4 to 5E-3mbar |
| Ion Energy |
50 to 250eV |
| Current Density |
up to 2 mA/cm2 |
| Extraion |
grounded W-Grid |
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| Apps |
E-gun Assist |
