| Faraday Cup In plasma processing, there are two important parameters which are responsible for the final process results i.e. the kinetic energy of the ions impacting to surface and the current density of these ions. The Faraday Cup System CEA4 is a precise tool in order to determine Ion energy and Ion current density. It can be applied in all kind kinds of plasma environment up to a pressure of 5E-2 mbar and enables to calibrate your process in order to get best scientific understanding. |
| Data Aquiring | Faraday CUP "CEA 4" |  |
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| Energy Range | 5eV to 1000eV | |||
| Resolution | 1eV | |||
| Current Range | 0.01 to 10 mA | |||
| Pressure Range | 1E-5 to 1E-2mbar | |||
| Software Visualization | ||||
| Ion Energy Distribution IED | ||||
| Ion Energy | ||||
| Ion Current Density | ||||
| Ion Energy vs Time | ||||
| Ion Energy vs time | ||||