| COPRA Cube For an introduction to COPRA plasma processing the COPRA Cube is the right choice to go for on an R&D level. The Cube System is offered with all different kinds of plasma processes like PECVD, Chemical and Physical Etching and PVD Assist. It allows one also the adaption of particular analysis tools like Optical Emission or Mass Spectrometers. Its flexible design including 4 replaceable walls enables the customer a maximum degree of freedom in arranging its own process geometry. |
| Internal Dimension | 420 x 420x 420mm |  |
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| Door Opening | 330 x 330 mm | ||
| Chamber | stainless steel 1.4301 | ||
| Base Pressure | below 1E-6 mbar | ||
| Leakage Rate | below 1E-9 mbar l / s | ||
| Design | |||
| 2 fixed side walls with 1x DN250 ISO-K and 4x DN40 ISO-K | |||
| 3 x removable side walls | |||
| 1 x door | |||